Effect of Basic Additives on Acid-Catalyzed Electron-Beam...

Japanese Journal of Applied Physics 2000 / 3 Vol. 39; Iss. Part 1, No

Effect of Basic Additives on Acid-Catalyzed Electron-Beam Negative Resist Using Intramolecular Dehydration of Phenylcarbinol

Migitaka, Sonoko, Yamamoto, Jiro, Uchino, Shou-ichi, Hashimoto, Michiaki, Murai, Fumio, Shiraishi, Hiroshi
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.1387
Date:
March, 2000
File:
PDF, 229 KB
english, 2000
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