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In-line Optical Lever System for Ultrasmall Cantilever Displacement Detection
Kikukawa, Atsushi, Koyanagi, Hajime, Etoh, Kimitoshi, Hosaka, SumioVolume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.1885
Date:
April, 2000
File:
PDF, 319 KB
english, 2000