The Effect of Surface Cleaning by Wet Treatments and Ultra...

Japanese Journal of Applied Physics 2000 / 7 Vol. 39; Iss. Part 1, No

The Effect of Surface Cleaning by Wet Treatments and Ultra High Vacuum Annealing for Ohmic Contact Formation of P-Type GaN

Waki, Ichitaro, Fujioka, Hiroshi, Ono, Kanta, Oshima, Masaharu, Miki, Hisayuki, Fukizawa, Akira
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.4451
Date:
July, 2000
File:
PDF, 196 KB
english, 2000
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