Kinetics of hillock growth in Al and Al-alloys

Microelectronic Engineering 2000 Vol. 50; Iss. 1-4

Kinetics of hillock growth in Al and Al-alloys

Michał Zaborowski, Piotr Dumania
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Volume:
50
Year:
2000
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(99)00296-8
File:
PDF, 1.84 MB
english, 2000
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