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Detection of Supersonic Waves Emitted from Anomalous Arc Discharge in Plasma Processing Equipment
Yasaka, Mitsuo, Takeshita, Masayoshi, Miyagawa, RyujiVolume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.L1286
Date:
December, 2000
File:
PDF, 287 KB
english, 2000