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Defect Printability for 100 nm Patterns in X-Ray Lithography
Watanabe, Hiroshi, Marumoto, Kenji, Matsui, YasujiVolume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.457
Date:
February, 2001
File:
PDF, 162 KB
english, 2001