Comparative Study of Pore Size of Low-Dielectric-Constant...

Japanese Journal of Applied Physics 2001 / 4 Vol. 40; Iss. Part 2, No

Comparative Study of Pore Size of Low-Dielectric-Constant Porous Spin-on-Glass Films Using Different Methods of Nondestructive Instrumentation

Kondoh, Eiichi, Baklanov, Mikhail R., Lin, Eric, Gidley, David, Nakashima, Akira
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.L323
Date:
April, 2001
File:
PDF, 484 KB
english, 2001
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