A Low-Temperature Dehydration Method of Silica Films

Japanese Journal of Applied Physics 2001 / 1 Vol. 40; Iss. Part 2, No

A Low-Temperature Dehydration Method of Silica Films

Fukumura, Tatsuya, Sugahara, Satoshi, Matsumura, Masakiyo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.L46
Date:
January, 2001
File:
PDF, 313 KB
english, 2001
Conversion to is in progress
Conversion to is failed