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Combinatorial Fabrication Process for a-Si:H Thin Film Transistors
Aiyer, Hemantkumar N., Nishioka, Daikichi, Maruyama, Ryuichirou, Shinno, Hiroyuki, Matsuki, Nobuyuki, Miyazaki, Kaori, Fujioka, Hiroshi, Koinuma, HideomiVolume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.L81
Date:
January, 2001
File:
PDF, 415 KB
english, 2001