Stable Surface-Wave Plasma through Excitation of Standing Surface Wave Using Plane Multislot Antenna
Suzuki, Nobumasa, Kitagawa, Hideo, Uchiyama, ShinzoVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.3930
Date:
June, 2002
File:
PDF, 404 KB
english, 2002