![](/img/cover-not-exists.png)
Influence of Thermal Properties of Polymers on NanoImprint Lithography Performance
Perret, Corinne, Gourgon, Cécile, Micouin, Guillaume, Grolier, Jean PierreVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.4203
Date:
June, 2002
File:
PDF, 194 KB
english, 2002