Treatment of Fluorocarbon Using Nonthermal Plasma Produced...

Japanese Journal of Applied Physics 2002 / 8 Vol. 41; Iss. Part 1, No

Treatment of Fluorocarbon Using Nonthermal Plasma Produced by Atmospheric Discharge

Hayashi, Nobuya, Yamamoto, Kazuhiro, Ihara, Satoshi, Kamatani, Masaki, Satoh, Saburoh, Yamabe, Chobei
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.5399
Date:
August, 2002
File:
PDF, 169 KB
english, 2002
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