Consideration of Performance Limitation of Sub-100-nm Double-Gate Silicon-on-Insulator (SOI) Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs)
Yanagi, Shin-ichiro, Omura, YasuhisaVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.L1096
Date:
October, 2002
File:
PDF, 70 KB
english, 2002