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Novel Method of Estimating Dielectric Constant for Low-k Materials
Fukuda, Takuya, Aoi, Nobuo, Matsunaga, HironoriVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.L307
Date:
March, 2002
File:
PDF, 169 KB
english, 2002