MO CVD interconnects for spherical semiconductors
Ivan Murzin, Jeffrey Miller, Ajay Tapiawala, Nobuo TakedaVolume:
50
Year:
2000
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(99)00322-6
File:
PDF, 1.38 MB
english, 2000