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Fabrication and Characterization of AlGaAs-based Photonic Crystal Slab Waveguides by Precisely Controlled Self-Aligned Selective-Oxidation Process
Tanaka, Yu, Sugimoto, Yoshimasa, Ikeda, Naoki, Yang, Tao, Asakawa, Kiyoshi, Watanabe, Yoshinori, Inoue, Kuon, Maruyama, Taishi, Miyashita, Kazuya, Ishida, KojiVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.7331
Date:
December, 2003
File:
PDF, 320 KB
english, 2003