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XY-Stage Driving Electron-Beam Mastering with Nanometer-Accuracy Positioning for High-Density Optical Disk
Nishida, Tetsuya, Isshiki, Fumio, Suzuki, Tatsundo, Yamaoka, Masahiro, Miyauchi, Yasushi, Saga, Hideki, Hosaka, SumioVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.772
Date:
February, 2003
File:
PDF, 482 KB
english, 2003