Organic Contamination Dependence of Process-Induced...

Japanese Journal of Applied Physics 2003 / 12 Vol. 42; Iss. Part 2, No

Organic Contamination Dependence of Process-Induced Interface Trap Generation in Ultrathin Oxide Metal Oxide Semiconductor Transistors

Khosru, Quazi Deen Mohd, Yokoyama, Shin, Nakajima, Anri, Shibahara, Kentaro, Kikkawa, Takamaro, Sunami, Hideo, Yoshino, Takenobu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.L1429
Date:
December, 2003
File:
PDF, 335 KB
english, 2003
Conversion to is in progress
Conversion to is failed