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Organic Contamination Dependence of Process-Induced Interface Trap Generation in Ultrathin Oxide Metal Oxide Semiconductor Transistors
Khosru, Quazi Deen Mohd, Yokoyama, Shin, Nakajima, Anri, Shibahara, Kentaro, Kikkawa, Takamaro, Sunami, Hideo, Yoshino, TakenobuVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.L1429
Date:
December, 2003
File:
PDF, 335 KB
english, 2003