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Synchrotron X-Ray Topography of Lattice Undulation of Bonded Silicon-On-Insulator Wafers
Fukuda, Kazunori, Yoshida, Takayoshi, Shimura, Takayoshi, Yasutake, Kiyoshi, Umeno, MasatakaVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.1081
Date:
March, 2004
File:
PDF, 303 KB
english, 2004