Fabrication of 50 nm Trigate Silicon On Insulator...

Fabrication of 50 nm Trigate Silicon On Insulator Metal–Oxide–Silicon Field-Effect Transistor without Source/Drain Activation Annealing

Im, Kiju, Cho, Won-Ju, Ahn, Chang-Geun, Yang, Jong-Heon, Oh, Jihun, Lee, Seongjae, Hwang, Hyunsang
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.2438
Date:
May, 2004
File:
PDF, 168 KB
english, 2004
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