The Extraction of Develop Parameters by Using...

Japanese Journal of Applied Physics 2004 / 6 Vol. 43; Iss. 6B

The Extraction of Develop Parameters by Using Cross-Sectional Critical Shape Error Method

Kim, Hyoung-Hee, Park, Jun-Tack, Choi, Jung-Wook, An, Ilsin, Oh, Hye-Keun
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.3692
Date:
June, 2004
File:
PDF, 145 KB
english, 2004
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