Monte-Carlo-Based Automatic Design of Chromeless Phase Shift Mask
Lee, Jai-Cheol, Oh, Yong-Ho, Lim, Sungwoo, Go, Chun Soo, Roh, Sung SuVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.514
Date:
February, 2004
File:
PDF, 543 KB
english, 2004