A Study of Surface Resistance of Si(100)

Japanese Journal of Applied Physics 2004 / 12 Vol. 43; Iss. 12

A Study of Surface Resistance of Si(100)

Yukawa, Motonobu, Tatsumi, Shunsuke, Kitagawa, Hiroki, Iida, Shoji
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Volume:
43
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.8248
Date:
December, 2004
File:
PDF, 444 KB
2004
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