Design and Fabrication of MOS Device Circuits with...

Japanese Journal of Applied Physics 2005 / 4 Vol. 44; Iss. 4B

Design and Fabrication of MOS Device Circuits with Reticle-Free Exposure Method

Wakasugi, Katsuhiko, Wakimoto, Satoshi, Nakada, Akira, Ohshima, Ichiro, Kubota, Hiroshi, Nakamura, Kazumitsu
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Volume:
44
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2279
Date:
April, 2005
File:
PDF, 651 KB
2005
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