Fabrication of Crystalline HfO 2 High-κ Dielectric Films Deposited on Crystalline γ-Al 2 O 3 Films
Okada, Takayuki, Shahjahan, Mohammad, Sawada, Kazuaki, Ishida, MakotoVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2320
Date:
April, 2005
File:
PDF, 891 KB
english, 2005