Development of Three Dimensional LIGA Process to Fabricate Spiral Microcoil
Mekaru, Harutaka, Kusumi, Shinji, Sato, Noriaki, Shimizu, Masami, Yamashita, Michiru, Shimada, Osamu, Hattori, TadashiVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.5749
Date:
July, 2005
File:
PDF, 248 KB
english, 2005