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Hydrogen migration in wet-thermally grown silicon dioxide layers due to high dose 15N ion beam irradiation
K. Maser, U. Mohr, R. Leihkauf, K. Ecker, U. Beck, D. Grambole, R. Grötzschel, F. Herrmann, J. Krauser, A. WeidingerVolume:
48
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(99)00356-1
File:
PDF, 321 KB
english, 1999