Effect of Oxygen Plasma Irradiation on Hydrogen...

Japanese Journal of Applied Physics 2006 / 11 Vol. 45; Iss. 11

Effect of Oxygen Plasma Irradiation on Hydrogen Silsesquioxane Nanopatterns Replicated by Room-Temperature Nanoimprinting

Kawamori, Masanori, Nakamatsu, Ken-ichiro, Haruyama, Yuichi, Matsui, Shinji
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.8994
Date:
November, 2006
File:
PDF, 373 KB
english, 2006
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