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Electron Backscatter Diffraction Analysis for Polarization of SrBi 2 (Ta,Nb) 2 O 9 Ferroelectric Capacitors in Submicron Small Area
Kaibara, Kazuhiro, Tanaka, Keisuke, Uchiyama, Kiyoshi, Kato, Yoshihisa, Shimada, YasuhiroVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.262
Date:
January, 2008
File:
PDF, 344 KB
english, 2008