Fabrication of Volcano-Structured Double-Gate Field Emitter...

Japanese Journal of Applied Physics 2008 / 6 Vol. 47; Iss. 6

Fabrication of Volcano-Structured Double-Gate Field Emitter Array by Etch-Back Technique

Soda, Takashi, Nagao, Masayoshi, Yasumuro, Chiaki, Kanemaru, Seigo, Sakai, Toshikatsu, Saito, Nobuo, Neo, Yoichiro, Aoki, Toru, Mimura, Hidenori
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.5252
Date:
June, 2008
File:
PDF, 410 KB
english, 2008
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