Effects of Ion-Bombardment-Assist and High Temperature on...

Effects of Ion-Bombardment-Assist and High Temperature on Growth of Zinc Oxide Films by Microwave Excited High Density Plasma Enhanced Metal Organic Chemical Vapor Deposition

Asahara, Hirokazu, Inokuchi, Atsutoshi, Watanuki, Kohei, Hirayama, Masaki, Teramoto, Akinobu, Ohmi, Tadahiro
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.04C135
Date:
April, 2009
File:
PDF, 274 KB
english, 2009
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