Focus Monitor Using Asymmetric Diffraction Rays by Off-Axis...

Japanese Journal of Applied Physics 2009 / 6 Vol. 48; Iss. 6

Focus Monitor Using Asymmetric Diffraction Rays by Off-Axis Monopole Illumination

Sato, Takashi, Inoue, Soichi, Kasa, Kentaro, Nakajima, Yumi, Nagai, Satoshi, Sato, Kazuya
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.06FA03
Date:
June, 2009
File:
PDF, 263 KB
english, 2009
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