Evaluation Method of the Quality Factor of Micromechanical Resonators Using Electron Beams
Ashiba, Hiroki, Warisawa, Shin'ichi, Ishihara, SunaoVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.06FG08
Date:
June, 2009
File:
PDF, 573 KB
english, 2009