Characteristics of tantalum pentoxide dielectric films...

Characteristics of tantalum pentoxide dielectric films deposited on silicon by excimer-lamp assisted photo-induced CVD using an injection liquid source

M.B. Mooney, P.K. Hurley, B.J. O'Sullivan, J.T. Beechinor, J.-Y. Zhang, I.W. Boyd, P.V. Kelly, J.-P. Sénateur, G.M. Crean, C. Jimenez, M. Paillous

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Volume:

Year:

1999

Language:

english

Pages:

DOI:

10.1016/s0167-9317(99)00389-5

File:

PDF, 456 KB

english, 1999

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