Structural properties of thin films of high dielectric constant materials on silicon
H.C. Lu, N. Yasuda, E. Garfunkel, T. Gustafsson, J.P. Chang, R.L. Opila, G. AlersVolume:
48
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(99)00390-1
File:
PDF, 400 KB
english, 1999