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Annealing Effects on Cathodoluminescence Properties of SiO x Films Deposited by Radio Frequency Sputtering
El-Razek Shamekh, Ahmed Mohamed Ahmed Abd, Tokuda, Norio, Inokuma, TakaoVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.01BF04
Date:
January, 2011
File:
PDF, 366 KB
english, 2011