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Process Performances of 2 ns Pulsed Discharge Plasma
Matsumoto, Takao, Wang, Douyan, Namihira, Takao, Akiyama, HidenoriVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08JF14
Date:
August, 2011
File:
PDF, 287 KB
english, 2011