Effects of Plasma Irradiation in Arsenic Plasma Doping...

Japanese Journal of Applied Physics 2013 / 02 Vol. 52; Iss. 2R

Effects of Plasma Irradiation in Arsenic Plasma Doping Using Overhang Test Structures

Kubota, Masafumi, Hayashi, Shigenori, Ogura, Mototsugu, Sasaki, Yuichiro, Okada, Susumu, Yamabe, Kikuo
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.021301
Date:
February, 2013
File:
PDF, 162 KB
english, 2013
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