Direct, etching of GaAs Crystal Excited by a Vacuum Ultraviolet Lamp
Zheng-Fu, Han, Yan-Lin, Liao, Hong-Jun, Zhou, Zuo-Hong, Jiang, Guo-Bin, Zhang, Zhuo-Liang, CaoVolume:
20
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/20/2/341
Date:
February, 2003
File:
PDF, 209 KB
english, 2003