Effect of Abrasive Concentration on Chemical Mechanical...

Chinese Physics Letters 2015 / 08 Vol. 32; Iss. 8

Effect of Abrasive Concentration on Chemical Mechanical Polishing of Sapphire

Yan, Wei-Xia, Zhang, Ze-Fang, Guo, Xiao-Hui, Liu, Wei-Li, Song, Zhi-Tang
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Volume:
32
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/32/8/088301
Date:
August, 2015
File:
PDF, 885 KB
english, 2015
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