Velocity sources as an explanation for experimentally...

Journal of Micromechanics and Microengineering 1999 / 06 Vol. 9; Iss. 2

Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

Nijdam, A J, Berenschot, J W, Suchtelen, J van, Gardeniers, J G E, Elwenspoek, M
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Volume:
9
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/9/2/008
Date:
June, 1999
File:
PDF, 602 KB
english, 1999
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