Influence of ion species ratio on grid-enhanced plasma...

Chinese Physics 2004 / 01 Vol. 13; Iss. 1

Influence of ion species ratio on grid-enhanced plasma source ion implantation

Jiu-Li, Wang, Gu-Ling, Zhang, Yuan-Fu, Liu, You-Nian, Wang, Chi-Zi, Liu, Si-Ze, Yang
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Volume:
13
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/13/1/013
Date:
January, 2004
File:
PDF, 272 KB
english, 2004
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