Atomic force microscopy study of sputter-induced topography...

Atomic force microscopy study of sputter-induced topography on silver-coated silicon by a defocused beam of argon neutrals

W. Dümmler, N. Maloufi, S. Weber, C. Těte, S. Scherrer
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Volume:
173
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0168-1176(97)00265-6
File:
PDF, 411 KB
english, 1998
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