Atomic force microscopy study of sputter-induced topography on silver-coated silicon by a defocused beam of argon neutrals
W. Dümmler, N. Maloufi, S. Weber, C. Těte, S. ScherrerVolume:
173
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0168-1176(97)00265-6
File:
PDF, 411 KB
english, 1998