Importance of evaporation in the design of materials for...

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Importance of evaporation in the design of materials for step and flash imprint lithography

E. K. Kim, J. G. Ekerdt, C. G. Willson
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Year:
2005
Language:
english
DOI:
10.1116/1.1990162
File:
PDF, 843 KB
english, 2005
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