SrTiO3Thin Film Preparation by Ion Beam Sputtering and Its...

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SrTiO3Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties

S. Yamamichi, T. Sakuma, K. Takemura, Y. Miyasaka
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Year:
1991
Language:
english
DOI:
10.1143/JJAP.30.2193
File:
PDF, 688 KB
english, 1991
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