Interfacial Layers of High-Barrier Schottky Diode of...

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Interfacial Layers of High-Barrier Schottky Diode of Al/n-Type (100)Si Exposed to H2Plasma

H. Iwakuro, M. Tokonami, T. Kuroda, S. Tamaki, Y. Kitatsuji
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Year:
1993
Language:
english
DOI:
10.1143/JJAP.32.5487
File:
PDF, 116 KB
english, 1993
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