Studies of Corrosive Outgasses from Via Holes Using Thermal...

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Studies of Corrosive Outgasses from Via Holes Using Thermal Desorption Spectroscopy

S. Tokitoh, H. Uchida, H. Uchida, Y. Okuno, K. Fushimi, G. Liu, Y. Sakaya, N. Hirashita
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Year:
1995
Language:
english
DOI:
10.1143/JJAP.34.1021
File:
PDF, 841 KB
english, 1995
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