Ammonium-Salt-Added Silica Slurry for the Chemical Mechanical Polishing of the Interlayer Dielectric Film Planarization in ULSI's
Y. Hayashi, M. Sakurai, T. Nakajima, K. Hayashi, S. Sasaki, S. Chikaki, T. KunioYear:
1995
Language:
english
DOI:
10.1143/JJAP.34.1037
File:
PDF, 254 KB
english, 1995