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Ammonium-Salt-Added Silica Slurry for the Chemical...

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Ammonium-Salt-Added Silica Slurry for the Chemical Mechanical Polishing of the Interlayer Dielectric Film Planarization in ULSI's

Y. Hayashi, M. Sakurai, T. Nakajima, K. Hayashi, S. Sasaki, S. Chikaki, T. Kunio
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Year:
1995
Language:
english
DOI:
10.1143/JJAP.34.1037
File:
PDF, 254 KB
english, 1995
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