Ionic Species in 13.56 MHz Discharges in CF4Gas and...

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Ionic Species in 13.56 MHz Discharges in CF4Gas and Mixtures of It with Ar and O2

I. Ishikawa, S. Sasaki, K. Nagaseki, Y. Saito, S. Suganomata
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Year:
1997
DOI:
10.1143/JJAP.36.4648
File:
PDF, 560 KB
1997
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