Positive and Negative Ions in RF Plasmas of SF6/N2and...

  • Main
  • Positive and Negative Ions in RF...

Positive and Negative Ions in RF Plasmas of SF6/N2and SF6/Ar Mixtures in a Planar Diode

S. Sasaki, I. Ishikawa, K. Nagaseki, Y. Saito, S. Suganomata
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
1997
DOI:
10.1143/JJAP.36.847
File:
PDF, 1.11 MB
1997
Conversion to is in progress
Conversion to is failed